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THE REACTION OF VAPOR HF WITH CHEMICALLY FORMED SILICON OXIDE: PRODUCTION OF STABLE HYDROGEN- TERMINATED SURFACES

Author(s):
Barnett, J.M.
Grothe, P.A.
Martin, J.S.
Carpio, R.A.
Fowler, B.W.
Atluri, Vasu
Herbots, Nicole
2 more
Publication title:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-20
Pub. Year:
1995
Page(from):
126
Page(to):
133
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771153 [1566771153]
Language:
English
Call no.:
E23400/962140
Type:
Conference Proceedings

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