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18 results

Conference Proceedings

1. Dynamic actuation behavior of NiTi/Si diaphragm micropump

Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.324-330, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

2. Control of internal stress in SMA/Si bimorph microactuators

Wang,L. ; Xu,D. ; Cai,B. ; Cheng,X.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.340-345, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

3. Orthogonal method for processing of SU-8 resist in UV-LIGA

Liu,J. ; Zhu,J. ; Ding,G. ; Zhao,X. ; Cai,B.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.462-466, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

4. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant

Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.

Pub. info.:	Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.340-345, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3892

Conference Proceedings

5. Giant magnetoresistance and microstructure of CoCu granular alloy films

Zou,Q. ; Zhang,S. ; Cai,B. ; Wang,X.

Pub. info.:	Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia. pp.401-407, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3241

Conference Proceedings

6. DEM technique:a new three-dimensional microfabrication technique for nonsilicon materials

Chen,D. ; Zhang,D. ; Ding,G. ; Zhao,X. ; Zhang,J. ; Yang,C. ; Cai,B.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.1099-1104, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

7. Calculation of the power spectral density of the wavefront

Zhang,R. ; Cai,B. ; Yang,C. ; Xu,Q. ; Gu,Y.

Pub. info.:	Advanced optical manufacturing and testing technology : 1-3 November 2000, Chengdu, China. pp.295-300, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4231

Conference Proceedings

8. Deposition of TiO2 thin films by plasma-enhanced chemical vapor deposition

Li,W. ; Zhao,J. ; Zhao,X.-L. ; Cai,B.

Pub. info.:	Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings. pp.398-401, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4086

Conference Proceedings

9. Microfabrication process study for stator winding of electromagnetic micromotor

Zhao,X.-L. ; Cai,B. ; Yang,C. ; Zhang,C.

Pub. info.:	Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings. pp.856-859, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4086

10.

Conference Proceedings

10. Novel micropump actuated by thin film shape memory alloy

Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.

Pub. info.:	Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.369-375, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3891

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