1.

Conference Proceedings
Conference Proceedings
1. Dynamic actuation behavior of NiTi/Si diaphragm micropump
Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.324-330,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
Ding,G. ; Yu,A. ; Zhao,X. ; Xu,D. ; Cai,B. ; Shen,T.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.340-345,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
3.

Conference Proceedings
Conference Proceedings
3. Novel micropump actuated by thin film shape memory alloy
Xu,D. ; Cai,B. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Wang,L. ; Zhao,X.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.369-375,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891
4.

Conference Proceedings
Conference Proceedings
4. Effect of easy axis orientation and bias field on MI effect in FeSiB amorphous film
Yu,J. ; Yu,A. ; Zhou,Y. ; Cai,B. ; Zhao,X.-L.
Pub. info.: Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings.  pp.514-517,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4086
5.

Conference Proceedings
Conference Proceedings
5. Reactive ion etching of CVD diamond films for MEMS applications
Ding,G.-F. ; Zhao,X.-L. ; Yu,A. ; Yang,C.-S. ; Cai,B. ; Yao,X.
Pub. info.: Micromachining and Microfabrication.  pp.224-230,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230