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Conference Proceedings

1. Magnetically actuated MEMS variable optical attenuator

Li, W. ; Zhao, X. ; Cai, B. ; Zhou, G. ; Zhang, M.

Pub. info.:	Micromachining and Microfabrication Process Technology and Devices. pp.89-96, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4601

Conference Proceedings

2. MEMS-based variable optical attenuator

Dai, X. ; Zhao, X. ; Li, W. ; Cai, B.

Pub. info.:	Micromachining and Microfabrication Process Technology and Devices. pp.97-103, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4601