Zhang, Y. ; Ding, G. ; Yang, C. ; Yu, A. ; Cai, B.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.131-137, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ding, G. ; Zhang, Y. ; Liu, J. ; Zhao, X. ; Cai, B. ; Shen, T.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.306-311, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering