Zhang, Y. ; Ding, G. ; Yang, C. ; Yu, A. ; Cai, B.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.131-137, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Liu, J. ; Cai, B. ; Zhu, J. ; Ding, G. ; Zhao, X. ; Yang, C. ; Chen, D.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.200-204, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering