1.

Conference Proceedings

Conference Proceedings
Zhang, Y. ; Ding, G. ; Yang, C. ; Yu, A. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.131-137,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
2.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Xu, D. ; Chen, J. ; Cai, B. ; Ding, G.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.147-152,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
3.

Conference Proceedings

Conference Proceedings
Ding, G. ; Zhang, Y. ; Liu, J. ; Zhao, X. ; Cai, B. ; Shen, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.306-311,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
4.

Conference Proceedings

Conference Proceedings
Dai, X. ; Zhao, X. ; Ding, G. ; Cai, B.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.1-6,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
5.

Conference Proceedings

Conference Proceedings
Liu, J. ; Cai, B. ; Zhu, J. ; Ding, G. ; Zhao, X. ; Yang, C. ; Chen, D.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.200-204,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601