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Simulations of a Non-planar Lithography and of Performance Characteristics of Arcade Microthermopiles for Energy Scavenging

Author(s):
V. Leonov ( IMEC, Leuven, Belgium )
Z. Wang
R. Pellens ( ASML Netherlands, Veldhoven, The Netherlands )
C. Gui
R. Vullers ( Holst Centre, Eindhoven, The Netherlands )
J. Su
1 more
Publication title:
AIAA meeting papers on disc
Title of ser.:
AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.:
2007
Pub. Year:
2007
No.:
2007-4782
Paper no.:
AIAA Paper 2007-4782
Pub. info.:
Reston, Va.: American Institute of Aeronautics and Astronautics
ISSN:
10877215
Language:
English
Call no.:
A07400/200712 [CD-ROM 2007 Disc 12]
Type:
Technical Paper

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