1.

Conference Proceedings

Conference Proceedings
Buczkowski,A. ; Romanowski,A. ; Kirscht,F.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.400-407,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
2.

Conference Proceedings

Conference Proceedings
Park,J.E. ; Schroder,D.K. ; Tan,S.E. ; Choi,B.D. ; Fletcher,M. ; Buczkowski,A. ; Kirscht,F.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.383-395,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218