Optimization of AlCu Wiring Delay in Advanced CMOS Technology
- Author(s):
Stamper, A. K. McGahay, V. Shapiro, M. Miller, L. A. Tian, X. Bryant, A. Serianni, L. A. - Publication title:
- Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 443
- Pub. Year:
- 1997
- Page(from):
- 183
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993471 [1558993479]
- Language:
- English
- Call no.:
- M23500/443
- Type:
- Conference Proceedings
Similar Items:
Kluwer Academic Publishers |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
3
Conference Proceedings
Antiferroelectric liquid crystal on CMOS technology for microdisplays and microphotonics
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Advanced Microprocessor-Based Technology in a Process Development/Semi-Works Facility
American Institute of Chemical Engineers |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |