Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.125-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Burckel, D. ; Zaidi, S. H. ; Lang, M. K. ; Frauenglass, A. ; Brueck, S. R. J.
Pub. info.:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.17-, 1994. Pittsburgh, PA. MRS - Materials Research Society