1.

Conference Proceedings

Conference Proceedings
Burckel, D. ; Zaidi, S. H. ; Lang, M. K. ; Frauenglass, A. ; Brueck, S. R. J.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.17-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
2.

Conference Proceedings

Conference Proceedings
Smolev, S. ; Biswas, A. ; Frauenglass, A. ; Brueck, S. R. J.
Pub. info.: Optical Microlithography XIX.  pp.61542K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154