Pretet, J. ; Ohata, A. ; Dieudonne, F. ; Allibert, F. ; Bresson, N. ; Matsumoto, T. ; Poiroux, T. ; Jomaah, J. ; Cristoloveanu, S.
Pub. info.:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.476-487, 2003. Pennington, N.J.. Electrochemical Society
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.317-324, 2005. Pennington, N.J.. Electrochemical Society