Bae, Y. W. ; Lee, W. Y. ; Besmann, T. M. ; Blau, P. J. ; Riester, L.
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.245-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Bae, Y. W. ; Lee, W. Y. ; Besmann, T. M. ; Blau, P. J. ; More, K. L. ; Braski, D. N.
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.. pp.231-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society