1.
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Conference Proceedings
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Fosshaug, H. ; Paulsson, A. ; Berzinsh, U. ; Magnusson, H.
Pub. info.: |
24th Annual BACUS Symposium on Photomask Technology. pp.1256-1267, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5567 |
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2.
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Conference Proceedings
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Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: |
MOEMS and Miniaturized Systems III. pp.277-284, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4983 |
|
3.
|
Conference Proceedings
|
Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: |
MOEMS Display and Imaging Systems. pp.222-229, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4985 |
|