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Conference Proceedings

1. FORMATION OF WELL-SEPARATED BURIED AND SURFACE NICKEL-SILICIDE LAYERS IN A SINGLE ION IMPLANTATION STEP

Wu, M.F. ; De Wachter, J. ; Hendrickx, P. ; Pattyn, H. ; Van Bavel, A.M. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Maenhoudt, M. ; Bruynseraede, Y.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.899-904, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON

Wu, M. F. ; Wachter, J. De ; Bavel, A.-M. Van ; Pattyn, H. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Temst, K. ; Wuyts, B. ; Bruynseraede, Y.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.159-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

3. Comparative study of structural properties and photoluminescence in InGaN layers with a high in content

Vantomme, A. ; Wu, M. F. ; Hogg, S. ; Langouche, G. ; Jacobs, K. ; Moerman, I. ; White, M. E. ; O'Donnell, K. P. ; Nistor, L. ; Landuyt, J. Van ; Bender, H.

Pub. info.:	GaN and related alloys - 1999 : symposium held November 28-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.W11.38.1-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	595

Conference Proceedings

4. Microstructural Studies of Co Silicide Layers Formed on SiGe and SiGeC

Jin, S. ; Bender, H. ; Donaton, R. A. ; Maex, K. ; Vantomme, A. ; Langouche, G. ; Amour, A. St. ; Sturm, J. C.

Pub. info.:	Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.. pp.481-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	440

Conference Proceedings

5. New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications

Donaton, R. A. ; Jin, S. ; Bender, H. ; Zagrebnov, M. ; Baert, K. ; Maex, K. ; Vantomme, A. ; Langouche, G.

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.307-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

Conference Proceedings

6. Formation and Thermal Stability of Nd0.32Y0.68Si1.7 Layers Formed by Channeled Ion Beam Synthesis

Wu, M. F. ; Vantomme, A. ; Hogg, S. ; Pattyn, H. ; Langouche, G. ; Jin, S. ; Bender, H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.191-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

7. Influence of SiGe Thickness on the Co/SiGe/Si Solid State Reaction

Donaton, R. A. ; Jin, S. ; Bender, H. ; Maex, K. ; Vantomme, A. ; Langouche, G.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.151-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

8. Structural Characterization of Ion Beam Synthesized Epitaxial ErSi2-x Layers

Bender, H. ; Wu, M. F. ; Vantomme, A. ; Pattyn, H. ; Langouche, G.

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.499-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402

Conference Proceedings

9. ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON

Wu, M. F. ; Wachter, J. De ; Bavel, A.-M. Van ; Pattyn, H. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Temst, K. ; Wuyts, B. ; Bruynseraede, Y.

Pub. info.:	Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.711-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	316

10.

Conference Proceedings

10. High Quality GdSi1.7 Layers Formed by High Dose Channeled Implantation

Wu, M. F. ; Vantomme, A. ; Pattyn, H. ; Langouche, G. ; Bender, H.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.535-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

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