Bellutti, P. ; Collini, A. ; Ferrario, L. ; Zorzi, N ; Zen, M.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.204-208, 1997. Pennington, NJ. Electrochemical Society
Bellutti, P. ; Boscardin, M. ; Zen, M. ; Zorzi, N.
Pub. info.:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.635-644, 1996. Pennington, NJ. Electrochemical Society