1.

Conference Proceedings
Conference Proceedings
1. CARRIER INDUCED SILICON PITTING IN THE HF-RCA CLEANING SEQUENCES
Lodi, D. ; Bellandi, E. ; Ninni, R.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.173-179,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. PREVENTION OF Si ETCHING IN DILUTED SC1 SOLUTIONS
Bellandi, E. ; Alessandri, M. ; Lodi, D. ; Strada, M. ; Pipia, S. ; Petitdidier, S. ; Levy, D.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.337-344,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
3.

Conference Proceedings
Conference Proceedings
3. EFFECT OF WAFER BACKSIDE ON PARTICLE ADDITION BEHAVIOUR OF HF-RCA SEQUENCE
Strada, M. ; Lodi, D. ; Bellandi, E. ; Alessandri, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.172-179,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26