Application of the aberration ring test (ARTEMIS) to determine lens quality and predict its lithographic performance
- Author(s):
Moers,M.H. ( ASML ) Laan,H.van der Zellenrath,M. Boeij,W.de Beaudry,N.A. Cummings,K.D. Zwol,A.van Becht,A. Willekers,R. - Publication title:
- Optical Microlithography XIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4346
- Pub. Year:
- 2001
- Vol.:
- 4346
- Pt.:
- Two of Two Parts
- Page(from):
- 1379
- Page(to):
- 1387
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440327 [0819440329]
- Language:
- English
- Call no.:
- P63600/4346
- Type:
- Conference Proceedings
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