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A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

Author(s):
Thomae, A. ( Robert Bosch GmbH, Reutlingen )
Schellin, R.
Lang, M.
Bauer, W.
Mohaupt, J.
Bischopink, G.
Tanten, L.
Baumann, H.
Emmerich, H.
Pinter, S.
Marek, J.
Funk, K.
Lorenz, G.
Neul, R.
9 more
Publication title:
1999 SAE International Congress and Exposition: technical paper
Title of ser.:
Society of Automotive Engineers technical paper series
Ser. no.:
1999
Pub. Year:
1999
No.:
1999-01-0931
Paper no.:
1999-01-0931
Page(from):
1
Page(to):
6
Pub. info.:
Warrendale, Penn.: Society of Automotive Engineers
ISSN:
01487191
Language:
English
Call no.:
S10400
Type:
Technical Paper

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