1.

Conference Proceedings

Conference Proceedings
Balasinski, A. ; Cetin, J.
Pub. info.: Photomask Technology 2006.  pp.63490D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings

Conference Proceedings
Balasinski, A. ; Cetin, J. ; Kahng, A. ; Xu, X.
Pub. info.: Photomask Technology 2006.  pp.63492B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349