Bruel, M. ; Aspar, B. ; Maleville, C. ; Moriceau, H. ; Auberton-Herve, A.J. ; Barge, T.
Pub. info.:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.3-14, 1997. Pennington, NJ. Electrochemical Society
Bruel, M. ; Aspar, B. ; Maleville, C. ; Moriceau, H. ; Auberton-Herve, A.J. ; Barge, T.
Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.13-24, 1997. Pennington, NJ. Electrochemical Society