Analysis of static and dynamic operational behavior of active micromembranes
- Author(s):
- Aswendt, P. ( Fraunhofer-Institut fur Werkzeugmaschinen und Umformtechnik (Germany) )
- Dean, T. ( Thales Research and Technology (France) )
- Publication title:
- Optical Micro- and Nanometrology in Manufacturing Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5458
- Pub. Year:
- 2004
- Page(from):
- 25
- Page(to):
- 33
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453808 [0819453803]
- Language:
- English
- Call no.:
- P63600/5458
- Type:
- Conference Proceedings
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