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EPITAXIAL SILICON ON YTTRIA-STABILIZED CUBIC ZIRCONIA (YSZ) AND SUBSEQUENT OXIDATION OF THE Si/YSZ INTERFACE

Author(s):
Mercandalli, L. M.
Pribat, D.
Dupuy, M.
Arnodo, C.
Rondi, D.
Dieumegard, D.
1 more
Publication title:
Layered structures, epitaxy, and interfaces : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
37
Pub. Year:
1985
Page(from):
205
Page(to):
210
Pages:
6
Pub. info.:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9780931837029 [0931837022]
Language:
English
Call no.:
M23500/37
Type:
Conference Proceedings

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