In-situ Etching of InP-Based Materials in MOVPE Reactor Using PCI3*
- Author(s):
- Publication title:
- State-of-the-art program on compound semiconductors XXXVI and wide bandgap semiconductors for photonic and electronic devices and sensors II : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-3
- Pub. Year:
- 2002
- Page(from):
- 253
- Page(to):
- 257
- Pages:
- 5
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773690 [1566773695]
- Language:
- English
- Call no.:
- E23400/2002-3
- Type:
- Conference Proceedings
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