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Identification of Black Deposits Produced During the Hydride-OMVPE Growth of GaN

Author(s):
Park, C.
Han, S.
Dob, C.
Yeo, S.
Yoon, D.
Hwang, S.-K.
Lee, K.-H.
Anderson, T.
3 more
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. Year:
2003
Page(from):
92
Page(to):
97
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

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