1.

Conference Proceedings
Conference Proceedings
1. Probing the Adsorption of Fluorine on Aluminum(III) Surfaces by Low-Energy Ion Scattering and Density Functional Calculations
Bastasz, R. ; Allendorf, M.D.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.59-68,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings
Conference Proceedings
2. Deposition of Titanium Nitride Films in a Stagnation Flow Reactor and Comparison With Model Predictions
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.291-299,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9