1.

Conference Proceedings
Conference Proceedings
1. Etching and surface smoothing with gas-cluster ion beams
Fenner, D. B. ; Torti, R. P. ; Allen, L. P. ; Toyoda, N. ; Kirkpatrick, A. R. ; Greer, J. A. ; DiFilippo, V. ; Hautala, J.
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.27-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585
2.

Conference Proceedings
Conference Proceedings
2. Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams
Toyoda, N. ; Lee, K. K. ; Luan, H-C. ; Lim, D. R. ; Agarwal, A. M. ; Wada, K. ; Kimerling, L. C. ; Allen, L. P. ; Fenner, D. B. ; Kirkpatrick A. R.
Pub. info.: Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.51-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 597