1.

Conference Proceedings
Conference Proceedings
1. Crystallization Behavior of Hf-Rich Aluminates and Influence on Film Dielectric Properties
Climent, M. ; Crivelli, B. ; Righini, G. ; Alberici, S. ; Alessandri, M. ; Elbaz, A.C. ; Pavia, G. ; Wiemer, C.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.313-318,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
2.

Conference Proceedings
Conference Proceedings
2. Physical-Chemical Evolution of Hf-Aluminates Upon Thermal Treatments
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Brazzelli, D. ; Elbaz, A. C. ; Frabboni, S. ; Ghidini, G. ; Maes, J. W. ; Ottaviani, G. ; Pavia, G. ; Wiemer, C.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.65-72,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
3.

Conference Proceedings
Conference Proceedings
3. Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM
Crivelli, B. ; Alessandri, M. ; Alberici, S. ; Cazzaniga, F. ; Dekadjevi, D. ; Maes, J.W. ; Ottaviani, G. ; Pavia, G. ; Queirolo, G. ; Santucci, S. ; Zanderigo, F.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.149-154,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745