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Development and operation of the microshutter array system

Author(s):
Publication title:
Micro (MEMS) and nanotechnologies for space, defense and security II : 18-20 April, 2008, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6959
Pub. Year:
2008
Page(from):
69590C-1
Page(to):
69590C-17
Pages:
17
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471505 [081947150X]
Language:
English
Call no.:
P63600/6959
Type:
Conference Proceedings

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