1.

Conference Proceedings

Conference Proceedings
A. Gu ; A. Zakhor
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings

Conference Proceedings
P. Gao ; A. Gu ; A. Zakhor
Pub. info.: Optical Microlithography XXI.  3  pp.69243N-1-69243N-18,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924