Search records | 東京科学大学図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Science Tokyo, Ookayama Library and Suzukakedai Library hold.
Members (from Ookayama, Suzukakedai and Tamachi campus）can obtain tables of contents of 17,000 foreign journals by SwetScan. The libraries do not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

9 results

1.

Conference Proceedings

1. THIN FILM FINE LINE WORK OF ADHESION BY MICROWEDGE INDENTATION

Boer, M. P. de ; Moody, N. R. ; Huang, H. ; Gerberich, W. W.

Pub. info.:	Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.693-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	356

2.

Conference Proceedings

2. Selective W for coating and releasing MEMS devices

Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; LaVan, D. A.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.135-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

3.

Conference Proceedings

3. Dynamics of MEMS microengines using optoelectronic laser interferometry

Brown, G. C. ; Pryputniewicz, R. J. ; Boer, M. P. de ; Smith, Norman

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.163-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

4.

Conference Proceedings

4. Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients

Boer, M. P. de ; Clews, P. J. ; Smith, B. K. ; Michalske, T. A.

Pub. info.:	Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.131-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	518

5.

Conference Proceedings

5. ADHESION OF TUNGSTEN FINE LINES ON SiO2 BY MICRO-WEDGE SCRATCHING

Boer, M. P. de ; Huang, H. ; Nelson, J. C. ; Wang, F. ; Gerberich, W. W.

Pub. info.:	Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.609-, 1994. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	318

6.

Conference Proceedings

6. Chemical vapor deposition coating for micromachines

Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; Dugger, M. T.

Pub. info.:	New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.21-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	616

7.

Conference Proceedings

7. FRACTURE TOUGHNESS OF SILICON AND THIN FILM MICRO-STRUCTURES BY WEDGE INDENTATION

Boer, M. P. de ; Huang, He ; Nelson, J. C. ; Jiang, Z. P. ; Gerberich, W. W.

Pub. info.:	Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.647-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	308

8.

Conference Proceedings

8. Friction measurement in MEMS using a new test structure

Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.129-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

9.

Conference Proceedings

9. THIN FILM ADHESION CHARACTERIZATION BY MICROWEDGE SCRATCHING OF PRECRACKED FINE LINES

Boer, M. P. de ; Huang, H. ; Gerberich, W. W.

Pub. info.:	Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.821-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	356

Select: Check all | Remove all

Sort order

9 results

Filtering by: