1.

Conference Proceedings

Conference Proceedings
Watanabe,T. ; Kinoshita,H. ; Miyafuji,A. ; Irie,S. ; Shirayone,S. ; Mori,S. ; Yano,E. ; Hada,H. ; Ohmori,K. ; Komano,H.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.600-607,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
2.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Oka,N. ; Watanabe,K. ; Ohmori,K. ; Inoue,M. ; Iguchi,K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.288-296,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Watanabe,K. ; Ohmori,K.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.801-809,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186