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Conference Proceedings

1. New concept photomask repeater with stitching exposure technique

Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. 4186 pp.34-45, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

2. Practical topography design for alternating phase-shifting mask

Tanaka,S. ; Nakamura,H. ; Kawano,K. ; Inoue,S.

Pub. info.:	Optical Microlithography IX. Part2 pp.473-484, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2726

Conference Proceedings

3. Rectifiers for suppressing depolarization caused by differential transmission and phase shift in high NA lenses

Shribak,M.I. ; Inoue,S. ; Oldenbourg,R.

Pub. info.:	Polarization analysis, measurement, and remote sensing IV : 29-31 July 2001, San Diego, USA. 4481 pp.163-174, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4481

Conference Proceedings

4. New-concept i-line stepper for mask fabrication

Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VII. pp.641-648, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4066

Conference Proceedings

5. New photomask Pattern generation method based on i-line stepper

Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VII. pp.631-640, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4066

Conference Proceedings

6. Measurement of transmittance variation of projection lenses depending on the light paths using a grating-pinhole mask

Sato,K. ; Inoue,S.

Pub. info.:	Optical Microlithography XIV. 4346 pp.379-386, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

Conference Proceedings

7. Viscosity of the Melt of ZrF4-BaF2-LaF3-AlF3-NaF System

Yano,T. ; Inoue,S. ; Kawazoe,H. ; Yamane,M.

Pub. info.:	Halide glasses VI : proceedings of the 6th International Symposium on Halide Glasses, held at Technical University of Clausthal, Germany, October 1-5, 1989. pp.563-568, 1991. Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	67-68

Conference Proceedings

8. Automatic tracking sensor camera system

Tsuda,T. ; Kato,D. ; Ishikawa,A. ; Inoue,S.

Pub. info.:	Machine Vision Applications in Industrial Inspection IX. 4301 pp.144-153, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4301

Conference Proceedings

9. Improvement of photomask repeater for 130-nm lithography

Kyoh,S. ; Inoue,S. ; Mori,I. ; Irie,N. ; Ishii,Y. ; Umatate,T. ; Kokubo,H. ; Hayashi,N.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VIII. 4409 pp.277-286, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4409

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Conference Proceedings

10. Estimation of IR transparency of ZnCl2-KBr glass by molecular dynamics

Inoue,S. ; Tamaki,M. ; Kawazoe,H. ; Yamane,M.

Pub. info.:	Halide glasses : proceedings of the Fourth International Symposium on Halide Glasses, held in Monterey, California, U.S.A., 26-29 January 1987. Pt.2 pp.609-614, 1987. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	19-20

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Author: Inoue,S.