1.

Conference Proceedings

Conference Proceedings
H. Shin ; R. Raju ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XII.  2  pp.692132-1-692132-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
2.

Conference Proceedings

Conference Proceedings
C. H. Castano ; D. N. Ruzic ; S. N. Srivastava ; K. C. Thompson ; J. Sporre
Pub. info.: Emerging lithographic technologies XII.  2  pp.692137-1-692137-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
3.

Conference Proceedings

Conference Proceedings
M. J. Neumann ; M. J. Cruce ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XII.  2  pp.69213D-1-69213D-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
4.

Conference Proceedings

Conference Proceedings
W. M. Lytle ; H. Shin ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
5.

Conference Proceedings

Conference Proceedings
H. Qiu ; S. N. Srivastava ; J. C. Anderson ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XI.  6517  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
6.

Conference Proceedings

Conference Proceedings
K. C. Thompson ; S. N. Srivastava ; E. L. Antonsen ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XI.  6517  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
7.

Conference Proceedings

Conference Proceedings
H. Shin ; S. N. Srivastava ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
8.

Conference Proceedings

Conference Proceedings
J. B. Spencer ; D. A. Alman ; B. E. Jurczyk ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XI.  6517  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
9.

Conference Proceedings

Conference Proceedings
M. J. Neumann ; M. Cruce ; P. Brown ; S. N. Srivasta ; D. N. Ruzic ; O. Khodykin
Pub. info.: Emerging lithographic technologies XI.  6517  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
10.

Conference Proceedings

Conference Proceedings
C. R. M. Struck ; M. J. Neumann ; R. Raju ; R. L. Bristol ; D. N. Ruzic
Pub. info.: Lithography Asia 2008.  2  pp.71402P-1-71402P-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140