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5 results

1.

Conference Proceedings

1. Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Allen,R.A. ; Ghoshtagore,R.N. ; Cresswell,M.W. ; Linholm,L.W. ; Sniegowski,J.J.

Pub. info.:	Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California. pp.124-131, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3332

2.

Conference Proceedings

2. Comparison of electrical CD measurements and cross-section lattice-plane counts of submicrometer features replicated in(100)silicon-on-insulator material

Cresswell,M.W. ; Bonevich,J.E. ; Headley,T.J. ; Allen,R.A. ; Giannuzzi,L.A. ; Everist,S.C. ; Ghoshtagore,R.N. ; Shea,P.J.

Pub. info.:	Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.74-83, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3998

3.

Conference Proceedings

3. Linewidth measurement intercomparison on a BESOI sample

Villarrubia,J.S. ; Vladar,A.E. ; Lowney,J.R. ; Postek,M.T. ; Allen,R.A. ; Cresswell,M.W. ; Ghoshtagore,R.N.

Pub. info.:	Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.84-95, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3998

4.

Conference Proceedings

4. Noncontact electrical critical dimensions metrology sensor for chrome photomasks

Guillaume,N. ; Lahti,M. ; Cresswell,M.W. ; Allen,R.A. ; Linholm,L.W. ; Zaghloul,M.E.

Pub. info.:	21st Annual BACUS Symposium on Photomask Technology. 4562 pp.822-829, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4562

5.

Conference Proceedings

5. Electrical test structures replicated in silicon-on-insulator material

Cresswell,M.W. ; Sniegowski,J.J. ; Ghoshtagore,R.N. ; Allen,R.A. ; Linholm,L.W. ; Villarrubia,J.S.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography X. pp.659-676, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2725

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