1.

Conference Proceedings

Conference Proceedings
Boer, M. P. de ; Moody, N. R. ; Huang, H. ; Gerberich, W. W.
Pub. info.: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.693-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 356
2.

Conference Proceedings

Conference Proceedings
Boer, M. P. de ; Clews, P. J. ; Smith, B. K. ; Michalske, T. A.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.131-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
3.

Conference Proceedings

Conference Proceedings
Boer, M. P. de ; Huang, H. ; Nelson, J. C. ; Wang, F. ; Gerberich, W. W.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.609-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318
4.

Conference Proceedings

Conference Proceedings
Boer, M. P. de ; Huang, H. ; Gerberich, W. W.
Pub. info.: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.821-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 356
5.

Conference Proceedings

Conference Proceedings
Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; LaVan, D. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.135-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
6.

Conference Proceedings

Conference Proceedings
Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.129-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
7.

Conference Proceedings

Conference Proceedings
Brown, G. C. ; Pryputniewicz, R. J. ; Boer, M. P. de ; Smith, Norman
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.163-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
8.

Conference Proceedings

Conference Proceedings
Boer, M. P. de ; Huang, He ; Nelson, J. C. ; Jiang, Z. P. ; Gerberich, W. W.
Pub. info.: Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.647-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 308
9.

Conference Proceedings

Conference Proceedings
Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; Dugger, M. T.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.21-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616