1.

Conference Proceedings
Conference Proceedings
1. Evaluation of various alternating phase shifting mask processes for KrF lithography
Yoon,S.-Y. ; Cha,H.-S. ; Choi,S.-J. ; Jung,S.-M. ; Choi,S.-S. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1017-1025,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings
Conference Proceedings
2. Optimization of alternating phase shifting mask structure
Cha,H.-S. ; Choi,S.-J. ; Yoon,S.-Y. ; Jung,S.-M. ; Choi,S.-S. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1008-1016,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562