1.

Conference Proceedings

Conference Proceedings
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.406-414,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings

Conference Proceedings
Yang, H. ; Choi, J. ; Cho, B. ; Yim, D. ; Kim, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.1-8,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
3.

Conference Proceedings

Conference Proceedings
Yang, H. ; Park, C. ; Hong, J. ; Jeong, G. ; Cho, B. ; Choi, J. ; Kang, C. ; Yang, K. ; Kang, E. ; Ji, S. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.437-443,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings

Conference Proceedings
Yang, H. ; Choi, J. ; Cho, B ; Hong, J. ; Song, J. ; Yim, D. ; Kim, J. ; Yamamoto. M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615232-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
5.

Conference Proceedings

Conference Proceedings
Park, C. ; Lee, J. ; Yang, K. ; Tseng, S. ; Min, Y.-H ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Optical Microlithography XIX.  pp.61540F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
6.

Conference Proceedings

Conference Proceedings
Hong, J. ; Lee, J. ; Kang, E. ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
7.

Conference Proceedings

Conference Proceedings
Yim, D. ; Yang, H. ; Park, C. ; Hong, J. ; Choi, J.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.107-118,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754