1.

Conference Proceedings

Conference Proceedings
Lee, K. ; Yedur, S. ; Tavassoli, M. ; Baik, K. ; Tabet, M.
Pub. info.: Photomask Technology 2006.  pp.63490M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings

Conference Proceedings
Lee, K. M. ; Yedur, S. ; Tabet, M. ; Tavassoli, M.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992