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16 results

Conference Proceedings

1. Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Allen,R.A. ; Ghoshtagore,R.N. ; Cresswell,M.W. ; Linholm,L.W. ; Sniegowski,J.J.

Pub. info.:	Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California. pp.124-131, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3332

Conference Proceedings

2. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

Craig Barron,C. ; Davies,B.R. ; Sniegowski,J.J. ; Rodgers,M.S. ; Comtois,J.H. ; Michalicek,M.A.

Pub. info.:	Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.10-16, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3223

Conference Proceedings

3. Performance trade-offs for a surface micromachined microengine

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.182-191, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

Conference Proceedings

4. Chemical-mechanical polishing:enhancing the manufacturability of MEMS

Sniegowski,J.J.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.104-115, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

Conference Proceedings

5. W-coating for MEMS

Mani,S.S. ; Fleming,J.G. ; Sniegowski,J.J.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.150-157, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

Conference Proceedings

6. Reproducibility data on SUMMiT

Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.102-112, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874

Conference Proceedings

7. Thin Teflon-like films for MEMS: film properties and reliability studies

Smith,B.K. ; Brown,C.D. ; LaVigne,G. ; Sniegowski,J.J.

Pub. info.:	Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.114-124, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3511

Conference Proceedings

8. Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Smith,J.H. ; Montague,S. ; Sniegowski,J.J.

Pub. info.:	Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.64-73, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2639

Conference Proceedings

9. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.306-314, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

10.

Conference Proceedings

10. Friction in surface-micromachined microengines

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California. pp.197-204, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2722

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