1.

Conference Proceedings

Conference Proceedings
Yonehara, T. ; Sakaguchi, K. ; Sato, N.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.47-55,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
2.

Conference Proceedings

Conference Proceedings
Sato, N. ; Ishii, S. ; Yonehara, T.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.435-441,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
3.

Conference Proceedings

Conference Proceedings
Sato, N. ; Sakaguchi, K. ; Yamagata, K. ; Fujiyama, Y. ; Yonehara, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.443-454,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10