1.

Conference Proceedings

Conference Proceedings
Yonehara, T. ; Sakaguchi, K. ; Sato, N.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.47-55,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
2.

Conference Proceedings

Conference Proceedings
Sato, N. ; Sakaguchi, K. ; Yamagata, K. ; Fujiyama, Y. ; Yonehara, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.443-454,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings

Conference Proceedings
Sakaguchi, K. ; Tsuboi, T. ; Yanagita, K. ; Okabe, T. ; Takahashi, K. ; Sato, N.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.31-38,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-19