1.

Conference Proceedings

Conference Proceedings
Park, J.-G. ; Katoh, T. ; Yoo, H-C. ; Paik, U.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.202-209,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
2.

Conference Proceedings

Conference Proceedings
Katoh, T. ; Park, J.-G. ; Park, J.-H. ; Paik, U.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.193-201,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-1
3.

Conference Proceedings

Conference Proceedings
Kang, H.-G. ; Katoh, T. ; Lee, W.-M. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.215-222,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
4.

Conference Proceedings

Conference Proceedings
Katoh, T. ; Kim, S.-J. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.190-198,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21