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Conference Proceedings

1. High-accuracy laser mask repair technology using ps UV solid state laser

Morishige,Y.

Pub. info.:	Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore. pp.416-423, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4426

Conference Proceedings

2. High-accuracy laser mask repair system LM700A

Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Ueda,A. ; Haneda,T. ; Oomiya,M.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. pp.663-669, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

3. Laser mask repair system LM700A

Ueda,A. ; Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Haneda,T. ; Ohmiya,M.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology VIII. pp.574-582, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4409