1.

Conference Proceedings

Conference Proceedings
Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Ueda,A. ; Haneda,T. ; Oomiya,M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.663-669,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
2.

Conference Proceedings

Conference Proceedings
Ueda,A. ; Yoshino,Y. ; Morishige,Y. ; Watanabe,S. ; Kyusho,Y. ; Haneda,T. ; Ohmiya,M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.574-582,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409