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17 results

Conference Proceedings

1. Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Ichiki,M. ; Zhang,L. ; Wang,Z. ; Morikawa,Y. ; Tanaka,M. ; Maeda,R.

Pub. info.:	Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA. pp.387-394, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4467

Conference Proceedings

2. "Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection"

Murakoshi,Y. ; Shimizu,T. ; Takagi,H. ; Li,Y. ; Uchino,K. ; Yokoi,T. ; Maeda,R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.502-509, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

3. Development of microelectromechanical varactors

Lee,C.-H. ; Tsai,S.-H. ; Lin,C.-H. ; Maeda,R. ; Tsaur,J.-J. ; Fang,K.-J. ; Lu,J.-M. ; Lee,C. ; Fang,W.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.486-493, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

4. Microscanner actuated by double PZT thin film

Zhang,L. ; Lin,W.-M. ; Maeda,R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.528-534, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

5. Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Wang,Z.-J. ; Maeda,R. ; Hokawa,H.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.494-501, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

6. Micropump based on temperature dependence of liquid viscosity

Masumoto,S. ; Klein,A. ; Schroth,A. ; Maeda,R.

Pub. info.:	Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.364-371, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3242

Conference Proceedings

7. Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J.

Pub. info.:	Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.380-387, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3242

Conference Proceedings

8. Deposition of PZT thin films by pulsed laser ablation for MEMS application

Maeda,R. ; Kikuchi,K.M. ; Schroth,A. ; Umezawa,A. ; Masumoto,S.

Pub. info.:	Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.372-379, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3242

Conference Proceedings

9. Microfabrication technique for thick structure of metals and PZT

Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.472-477, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

10.

Conference Proceedings

10. New home for NEAT on the 1.2m/B37 at AMOS

Talent,D.L. ; Maeda,R. ; Walton,S. ; Sydney,P.F. ; Hsu,Y. ; Gameron,B. ; Kervin,P.W. ; Helin,E.F. ; Pravdo,S.H. ; Lawrence,K. ; Rabinowitz,D.

Pub. info.:	Imaging Technology and Telescopes. pp.225-236, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4091

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