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17 results

Conference Proceedings

1. "Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"

Maeda,R. ; Wang,Z. ; Chu,J. ; Lin,W.

Pub. info.:	Smart structures and devices : 13-15 December 2000, Melbourne, Australia. 4235 pp.40-47, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4235

Conference Proceedings

2. Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Wang,Z. ; Maeda,R. ; Kikuchi,K.M.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.948-955, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

3. Microscanner actuated by double PZT thin film

Zhang,L. ; Lin,W.-M. ; Maeda,R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. 4408 pp.528-534, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

4. Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Wang,Z.-J. ; Maeda,R. ; Hokawa,H.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. 4408 pp.494-501, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

5. Development of microelectromechanical varactors

Lee,C.-H. ; Tsai,S.-H. ; Lin,C.-H. ; Maeda,R. ; Tsaur,J.-J. ; Fang,K.-J. ; Lu,J.-M. ; Lee,C. ; Fang,W.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. 4408 pp.486-493, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

6. "Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection"

Murakoshi,Y. ; Shimizu,T. ; Takagi,H. ; Li,Y. ; Uchino,K. ; Yokoi,T. ; Maeda,R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. 4408 pp.502-509, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

7. Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Ichiki,M. ; Zhang,L. ; Wang,Z. ; Morikawa,Y. ; Tanaka,M. ; Maeda,R.

Pub. info.:	Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA. 4467 pp.387-394, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4467

Conference Proceedings

8. Transient measurement of surface deflection for beams and membranes in micromechanical devices

Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.

Pub. info.:	Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy. pp.618-623, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3411

Conference Proceedings

9. Microfabrication technique for thick structure of metals and PZT

Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.472-477, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

10.

Conference Proceedings

10. Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation

Takagi,H. ; Maeda,R. ; Hosoda,N. ; Suga,T.

Pub. info.:	Intergranular and interphase boundaries in materials : iib98 : proceedings of the 9th International Conference on Intergranular and Interphase Boundaries in Materials (iib98), held in Prague, Czech Republic, July, 1998. pp.341-344, 1999. Zurich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	294-296

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