1.

Conference Proceedings

Conference Proceedings
Murakoshi,Y. ; Shimizu,T. ; Takagi,H. ; Li,Y. ; Uchino,K. ; Yokoi,T. ; Maeda,R.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  4408  pp.502-509,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
2.

Conference Proceedings

Conference Proceedings
Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.472-477,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings

Conference Proceedings
Maeda,R. ; Murakoshi,Y. ; Shimizu,T. ; Li,Y. ; Takizawa,H.
Pub. info.: Smart structures and devices : 13-15 December 2000, Melbourne, Australia.  4235  pp.209-216,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4235