1.

Conference Proceedings

Conference Proceedings
Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.
Pub. info.: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy.  pp.618-623,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3411
2.

Conference Proceedings

Conference Proceedings
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.380-387,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
3.

Conference Proceedings

Conference Proceedings
Maeda,R. ; Kikuchi,K.M. ; Schroth,A. ; Umezawa,A. ; Masumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.372-379,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
4.

Conference Proceedings

Conference Proceedings
Masumoto,S. ; Klein,A. ; Schroth,A. ; Maeda,R.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.364-371,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
5.

Conference Proceedings

Conference Proceedings
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J. ; Matsumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.172-180,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
6.

Conference Proceedings

Conference Proceedings
Lin,W.-M. ; Schroth,A. ; Matsumoto,S. ; Lee,C. ; Maeda,R.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.133-140,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892