1.

Conference Proceedings

Conference Proceedings
Lucas,K.D. ; Ivin,V.V. ; Kudrja,V.P. ; Larin,D.Yu. ; Makhviladze,T.M. ; Medvedeva,M.G. ; Rogov,A.A. ; Verzunov,S.V. ; Yang,D.C.
Pub. info.: Optical Microlithography IX.  Part1  pp.348-359,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
2.

Conference Proceedings

Conference Proceedings
Ivin,V.V. ; Lucas,K.D. ; Makhviladze,T.M. ; Manuilov,V.V. ; Medvedeva,M.G
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.646-654,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings

Conference Proceedings
Ivin,V.V. ; Larin,D.Yu. ; Lucas,K.D. ; Makhviladze,T.M. ; Rogov,A.A. ; Verzunov,S.V.
Pub. info.: Optical Microlithography X.  pp.567-577,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051